Implementing an integrated framework for internal logistics management in automated semiconductor manufacturing

Abstract

Nowadays, productivity and ergonomic reasons impose the use of Automated Material Handling Systems (AMHS) to transfer work-in-process within modern semiconductor factories. It is necessary to manage the AMHS to attain high throughput and short cycle times. Traditional simulation-based models considered the AMHS as an isolated system and do not provide formal modelling approaches necessary for its efficient reuse and management. This paper studies the implementation of a global modelling framework for the operational behaviour of wafer factories by using an efficient AMHS control policy.